Publication | Closed Access
Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
29
Citations
17
References
2010
Year
Materials ScienceEngineeringTin DioxideGas SensorSurface ScienceApplied PhysicsMicrohotplate Gas SensorsThin FilmsGas DetectionChemical DepositionChemical Vapor DepositionAtomic Layer DepositionElectrochemical Gas SensorThin Film Processing
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