Concepedia

Publication | Closed Access

Patterning of Ge2Sb2Te5 phase change material using UV nano-imprint lithography

DOI

34

Citations

7

References

2006

Year

Ki‐Yeon Yang, Sung‐Hoon Hong, Deok‐kee Kim, Byung‐ki Cheong, Heon Lee
Microelectronic Engineering

References

YearCitations

Page 1