High-Speed Scanning of Piezo-Probes for Nano-fabrication

Abstract

Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe. Faster scanning of piezo-probes is achieved here (experimental results are presented) by using inversion of the piezo-dynamics—this approach uses a feedforward input voltage, applied to piezo-probe, to compensate for piezo vibrations.