Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII) - Concepedia

Concepedia

Publication | Closed Access

Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

15

Citations

7

References

2008

Year

V. Vervisch, Yannick Larmande, Philippe Delaporte, T. Sarnet, M. Sentis, Hasnaa Etienne, Frank Torregrosa, F. Cristiano

Applied Surface Science

Ion ImplantationEngineeringPhysicsLaser-induced BreakdownApplied PhysicsLaser ApplicationsLaser-plasma InteractionUltra Shallow JunctionsIon BeamLaser ActivationMicroelectronicsOptoelectronics

References

	Year	Citations

Page 1

Page 1