Crystallization study of chemically vapour-deposited amorphous silicon films by in situ x-ray diffraction - Concepedia

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Crystallization study of chemically vapour-deposited amorphous silicon films by in situ x-ray diffraction

24

Citations

4

References

1985

Year

R. Bisaro, N. Proust, J. Magariño, K. Zellama

Thin Solid Films

Materials ScienceEngineeringSilicon On InsulatorSurface ScienceApplied PhysicsSitu X-ray DiffractionCrystallization StudyThin FilmsAmorphous SolidCrystallographyChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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