Concepedia

Computer simulation of sputtering of polycrystalline materials

G. Betz, R. Dobrozemsky, F.P. Viehböck

International Journal of Mass Spectrometry and Ion Physics · 1971 · 42 citations · 15 references

DOI

Concepts

References

15

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

, , +15

Ion Bombardment of Solids

L. N. Large · Electronics and Power · 1968 · 574 citations

, , +9

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

Duane Rosenberg, G. K. Wehner · Journal of Applied Physics · 1962 · 431 citations

, , +5

Collection and sputtering experiments with noble gas ions

O. Almén, G. Bruce · Nuclear Instruments and Methods · 1961 · 417 citations

, , +7