An Apparatus for Electron Energy Analysis in Glow Discharge Plasmas

Abstract

An apparatus has been designed and built for the analysis of electron energies in low temperature glow discharge plasmas. The technique involves sampling the plasma via a molecular leak and energy analyzing the electrons by a retarding potential field. Integral retarding potential curves can be plotted directly on an X-Y recorder, or the integral signal can be differentiated electronically to yield a curve which is proportional to the electron energy distribution. The characteristics of the apparatus, including its resolving power, are discussed, and some preliminary results are described.