High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air - Concepedia

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High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air

168

Citations

22

References

2001

Year

Christopher L. Muhlstein, Stuart B. Brown, Robert O. Ritchie

Sensors and Actuators A Physical

Materials ScienceMaterials EngineeringEngineeringLow-cycle FatigueMechanical EngineeringThin FilmsSilicon On InsulatorAmbient AirThin Film ProcessingHigh-cycle Fatigue

References

	Year	Citations

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