Journal of the Less Common Metals · 1988 · 68 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials ChemistryThin FilmsSemiconductor InterfacesSemiconductor NanomaterialsSemiconductor SurfacesSilicon MaterialsSurface PhysicsThin Film AnnealingAnnealingAnnealing EffectsAnnealing Temperature EffectsMultilayer Thin Film AnnealingSurface Annealing
17
Implanted noble gas atoms as diffusion markers in silicide formation
S.S. Lau, J. W. Mayer, Helmut Müller et al. · Thin Solid Films · 1975 · 266 citations
Natural Sciences, Materials Engineering, Materials Science +5