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Vacuum-Deposited Thin Film of Linear Oligosilane Me(SiMe2)12Me
20
Citations
20
References
1996
Year
Materials ScienceEngineeringAbstract Thin FilmLinear Oligosilane MeMicrofabricationSurface ScienceApplied PhysicsSiliceneLinear OligosilaneThin Film Process TechnologyChemistryThin FilmsOligosilane FilmChemical Vapor DepositionSilicon On InsulatorThin Film Processing
Abstract Thin film of linear oligosilane, Me(SiMe2)12Me, was prepared by a vacuum-deposition method. In the film, the Si-backbones adopted all-trans conformation and highly oriented perpendicular to the substrate. The oligosilane film showed a sharp UV absorption at 285 nm attributed to the planar-zigzag form.
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