Stress and resistivity analysis of electrodeposited gold films for MEMS application

Micromechanical cantilever-based biosensors

Roberto Raiteri, M. Grattarola, Hans‐Jürgen Butt et al. · Sensors and Actuators B Chemical · 2001 · 728 citations

Micromechanical Cantilever-based Biosensors, Engineering, Micromachines +5

Design and performance of a microcantilever-based hydrogen sensor

David R. Baselt, Bernd Frühberger, E.H. Klaassen et al. · Sensors and Actuators B Chemical · 2002 · 227 citations

Engineering, Microfabrication, Hydrogen Transport +5

Innovative micromachined microwave switch with very low insertion loss

Chienliu Chang, Pei‐Zen Chang · Sensors and Actuators A Physical · 2000 · 83 citations

Electrical Engineering, Engineering, Microfabrication +4

Stress characterization of electroplated gold layers for low temperature surface micromachining

B. Margesin, Alvise Bagolini, V. Guarnieri et al. · 2004 · 57 citations

Engineering, Cyanide-gold Salt, Mechanical Engineering +20

Effects of diffusion on interfacial fracture of gold-chromium hybrid microcircuit films

N. R. Moody, David P. Adams, Douglas L. Medlin et al. · International Journal of Fracture · 2003 · 40 citations

Materials Science, Material Analysis, Engineering +9