Identification of subsurface damage in freestanding HVPE GaN substrates and its influence on epitaxial growth of GaN epilayers - Concepedia

Concepedia

Publication | Closed Access

Identification of subsurface damage in freestanding HVPE GaN substrates and its influence on epitaxial growth of GaN epilayers

20

Citations

13

References

2007

Year

James Grandusky, V. K. Jindal, Neeraj Tripathi, F. Shahedipour‐Sandvik, Hai Lu, E.B. Kaminsky, Rajesh Melkote

Journal of Crystal Growth

Materials EngineeringWide-bandgap SemiconductorElectrical EngineeringEngineeringSubsurface DamageSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DeviceHvpe GanEpitaxial Growth

References

	Year	Citations

Page 1

Page 1