Plasmapolymerized silicon organic thin films from HMDSN for capacitive humidity sensors

Humidity sensors: Principles and applications

Noboru Yamazoe, Yasuhiro Shimizu · Sensors and Actuators · 1986 · 615 citations

Engineering, Materials Engineering, Materials Science +12

Characterization of amorphous SiC:H films deposited from hexamethyldisilazane

Min Tae Kim, J. Lee · Thin Solid Films · 1997 · 128 citations

Natural Sciences, Materials Engineering, Materials Science +14

Synthesis of plasma-polymerized hexamethyldisiloxane (HMDSO) films by microwave discharge

Jakob Schwarz, Michael Schmidt, A. Ohl · Surface and Coatings Technology · 1998 · 81 citations

Natural Sciences, Materials Engineering, Materials Science +8

Plasma polymerization of organosilicon compounds

N. Inagaki, Shuji Kondo, M. Hirata et al. · Journal of Applied Polymer Science · 1985 · 71 citations

Natural Sciences, Chemistry, Materials Science +16

Comparative performance of linear, cross-linked, and plasma-deposited PMMA capacitive humidity sensors

A.R.K. Ralston, Jeffrey A. Tobin, Sateesh S. Bajikar et al. · Sensors and Actuators B Chemical · 1994 · 37 citations

Engineering, Materials Engineering, Materials Science +11