Surface oxide effects on failure of polysilicon MEMS after cyclic and monotonic loading - Concepedia

Concepedia

Publication | Closed Access

Surface oxide effects on failure of polysilicon MEMS after cyclic and monotonic loading

46

Citations

12

References

2008

Year

H. Kahn, Amir Avishai, Roberto Ballarini, A. H. Heuer

Scripta Materialia

Materials ScienceMonotonic LoadingMaterial AnalysisEngineeringMicrofabricationApplied PhysicsPolysilicon MemsSurface Oxide EffectsMicro-electromechanical SystemSilicon On InsulatorMicroelectronicsMicrostructure

References

	Year	Citations

Page 1