A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges

Piezoresistance Effect in Germanium and Silicon

Charles S. Smith · Physical Review · 1954 · 2K citations

Materials Science, Semiconductors, Engineering +13

Micromachined pressure sensors: review and recent developments

William P. Eaton, James H. Smith · Smart Materials and Structures · 1997 · 578 citations

Engineering, Mechanical Engineering, Pressure Sensors +19

Piezoresistancc effect in germanium and silicon

Charlie Smith · Physical Review D · 1954 · 497 citations

Materials Science, Piezoresistancc Effect, Engineering +5

Overview of automotive sensors

William J. Fleming · IEEE Sensors Journal · 2001 · 491 citations

Automotive Engineering, Engineering, Sensors +15

Nonlinear piezoresistance effects in silicon

Kazunori Matsuda, Katuhisa Suzuki, K. Yamamura et al. · Journal of Applied Physics · 1993 · 144 citations

Materials Science, Room Temperature, Semiconductor Technology +14