Concepedia

Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy

E.U. Boltaev, A.A. Dzhurakhalov

Materials Science and Engineering B · 2003 · 24 citations · 3 references

DOI

Concepts

References

3

Heteroepitaxy of metallic and semiconducting silicides on silicon

N. Cherief, R.C. Cinti, M. De Crescenzi et al. · Applied Surface Science · 1990 · 50 citations

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Low temperature formation of Si/silicide/Si double heterostructures by self-aligned MBE growth

T. Ohsima, Nobuo Nakamura, Kiyokazu Nakagawa et al. · Thin Solid Films · 1990 · 22 citations

, , +8

Electronic structure and optical properties of CaF2 films under low energy Ba+ ion-implantation combined with annealing

T.S. Pugacheva, A.T. Tashatov · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 20 citations

, , +8