Electrical properties of sputtered A1N films and interface analyses by Auger electron spectroscopy

Physics of Semiconductor Devices

Geoffrey Pridham · Electronics and Power · 1970 · 4K citations

Engineering, Electrical Engineering, Physics +12

Characteristics of the Surface-State Charge (Qss) of Thermally Oxidized Silicon

B. E. Deal, Michael C. Sklar, Andrew S. Grove et al. · Journal of The Electrochemical Society · 1967 · 708 citations

Engineering, Materials Engineering, Materials Science +17

A study of the charging and dissociation of SiO2 Surfaces by AES

B. Carrière, Bernard Lang · Surface Science · 1977 · 140 citations

Natural Sciences, Materials Engineering, Materials Science +12

Optical properties of aluminium nitride prepared by chemical and plasmachemical vapour deposition

J. Bauer, L. Biste, D. Bolze · physica status solidi (a) · 1977 · 103 citations

Natural Sciences, Chemistry, Materials Science +16

The Preparation and Properties of Aluminum Nitride Films

T. L. Chu, Rüdiger Kelm · Journal of The Electrochemical Society · 1975 · 95 citations

Natural Sciences, Materials Engineering, Materials Science +17