Thin Solid Films · 1998 · 30 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsPlasma Surface TreatmentPlasma-surface InteractionsThin-film DepositionArc DischargesArc Plasma PhysicsCathodic Arc DepositionEdge AreaPlasma DepositionPlasma-enhanced Deposition
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