Applied Physics Letters · 1989 · 154 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsThin FilmsEpitaxial GrowthLaser Material ProcessingThin-film DepositionThin-film MaterialsEpitaxial Film GrowthEpitaxial Thin FilmsEpitaxial Thin-film GrowthLaser AblationMaterial AblationSputteringThin-film Growth Mechanisms
Excimer laser ablative sputtering of sintered pellets of BaTiO3 has been used to epitaxially grow thin ∼1-μm-thick films of this material of LiF substrates.
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