Electric‐Field‐Guided Growth of Carbon Nanotubes during DC Plasma‐Enhanced CVD

Abstract

Abstract Carbon nanotubes (CNTs) have been grown aligned with the directions of electric fields in a DC plasma‐enhanced (DC PE) CVD process. The CNTs can be grown at various predefined angles with respect to the substrate. It is shown that the local electric field, even at the very surface of the substrates, can be inclined. The strength of the electric field inside the plasma sheath is estimated and the electric‐field directions near the surface of Si substrate where the CNTs grow are modeled. By control of the directions of these electric fields, several novel CNT morphologies are demonstrated, which could be useful for various applications.