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Glass-based microfluidic device fabricated by parylene wafer-to-wafer bonding for impedance spectroscopy

Materials ScienceEngineeringBiomedical DiagnosticsMicrofabricationParylene Wafer-to-wafer BondingApplied PhysicsGlass-based Microfluidic DeviceLab-on-a-chipImpedance SpectroscopyMicro-optical ComponentMicrofluidics