Concepedia

Publication | Closed Access

The influence of the ion implantation temperature and the flux on smart-cut© in GaAs

DOI

12

Citations

5

References

2005

Year

M. Webb, C. Jeynes, R. Gwilliam, Z. Tabatabaian, A. Royle, B.J. Sealy
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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