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Effect of Ru addition on the properties of Al-doped ZnO thin films prepared by radio frequency magnetron sputtering on polyethylene terephthalate substrate

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringPolyethylene Terephthalate SubstrateOxide ElectronicsApplied PhysicsGallium OxideRadio Frequency MagnetronRu AdditionThin FilmsThin Film Processing