Localized Functionalization of Single Nanopores

Abstract

Chemical functionality is localized at the entrance of single nanopores using the controlled growth of an oxide ring. Nanopores fabricated by focused-ion-beam machining on silicon platforms (see Figure and Cover) are locally functionalized by ion-beam-assisted oxide deposition followed by immobilization of DNA probes via silane chemistry. Ion-current measurements are used to demonstrate nanopore functionalization.