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Highly sensitive wafer-level packaged MEMS magnetic field sensor based on magnetoelectric composites

Materials ScienceMagnetismElectrical EngineeringBiomedical SensorsEngineeringMicrofabricationSensitive Wafer-levelPolymer-based MagnetMicroelectromechanical SystemsMicro-electromechanical SystemMagnetic DeviceMagnetoelectric CompositesMagnetic Sensor