Microelectronic Engineering · 2009 · 38 citations · 12 references
EngineeringManufacturing EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationMicrofabrication ProcessesMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsUltrasonic WeldingUltrasonicsMicrofluidic Device DesignMicrofluidic FabricationMicrofluidic InterconnectsUltrasonic Welding Process Parameters
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