Applied Physics Letters · 1987 · 73 citations · 8 references
Natural SciencesBioengineeringBiomedical EngineeringBiomedical OpticsOptical MaterialsPolymer ChemistryBiomedical Laser ApplicationsLaser OpticsLaser-tissue InteractionOptical PolymersOptical SpectroscopyTissue OpticsAblation PhysicsBeam Pulse DurationEtch DamageLaser AblationLaser FluenceLaser Pulse DurationPolyethylene TerephthalatePulse Duration Effects
Photoacoustic spectroscopy was used to measure the pulse duration dependence of the XeCl laser ablation of polyimide, polyethylene terephthalate, and post-mortem human aorta. It was observed that the ablation threshold exhibited only a weak dependence on pulse duration. Photoablation etch depth measurements of polyimide as a function of XeCl laser fluence indicated that over a practical etch depth range of 0.1 to 1 μm per laser pulse the etch depth was independent of the pulse duration.
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Excimer laser etching of polyimide
James H. Brannon, J. R. Lankard, A. I. Baise et al. · Journal of Applied Physics · 1985 · 386 citations
Natural Sciences, Materials Engineering, Materials Science +17
Ultraviolet laser ablation of polyimide films
R. Srinivasan, Bodil Braren, R. W. Dreyfus · Journal of Applied Physics · 1987 · 230 citations