The chemical composition changes of silicon and phosphorus in the process of native oxide formation of heavily phosphorus doped silicon - Concepedia

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The chemical composition changes of silicon and phosphorus in the process of native oxide formation of heavily phosphorus doped silicon

46

Citations

19

References

2001

Year

W.B. Ying, Yusuke Mizokawa, Y. Kamiura, K. Kawamoto, Wei Yang

Applied Surface Science

Chemical EngineeringEngineeringOxide ElectronicsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationChemistrySilicon On InsulatorNative Oxide FormationChemical Composition Changes

References

	Year	Citations

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