Prototype microvalve using a new magnetic microactuator

Abstract

In this paper, we describe the design, fabrication, and testing of a prototype microvalve which makes use of a novel magnetic microactuator. The completed device consists of three layers, with the bottom two layers making up the normally closed valve. The top layer (actuator) contains the flux generator on its top surface combined with Ni/Fe plated through holes for guiding the flux to the valve. The actuator and valve components are separately fabricated and then attached to form the completed device. Preliminary test results show that the valve is capable of controlling gas flow in the range of tens to hundreds of (mu) L/min. This device will, therefore, be useful in its target applications, which is a microfluidic total analysis system ((mu) TAS) that will require precise valving at moderate flow rates (about 100 (mu) L/min).