Publication | Closed Access

Polymerized monomolecular layers: A new class of ultrathin resins for microlithography

Materials ScienceEngineeringMicrofabricationPolymer SciencePolymerized Monomolecular LayersFabrication TechniqueUltrathin ResinsNanostructured PolymerNew ClassPolymer ChemistryNanolithography Method