Uniform illumination and rigorous electromagnetic simulations applied to CMOS image sensors

Abstract

This paper describes a new methodology we have developed for the optical simulation of CMOS image sensors. Finite Difference Time Domain (FDTD) software is used to simulate light propagation and diffraction effects throughout the stack of dielectrics layers. With the use of an incoherent summation of plane wave sources and Bloch Periodic Boundary Conditions, this new methodology allows not only the rigorous simulation of a diffuse-like source which reproduces real conditions, but also an important gain of simulation efficiency for 2D or 3D electromagnetic simulations. This paper presents a theoretical demonstration of the methodology as well as simulation results with FDTD software from Lumerical Solutions.