Low temperature amorphous and nanocrystalline silicon thin film transistors deposited by Hot-Wire CVD on glass substrate - Concepedia

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Low temperature amorphous and nanocrystalline silicon thin film transistors deposited by Hot-Wire CVD on glass substrate

23

Citations

6

References

2005

Year

M. Fonrodona, D. Soler, Jordi Escarré, F. Villar, J. Bertomeu, J. Andreu, Amar Saboundji, Nathalie Coulon, T. Mohammed-Brahim

Thin Solid Films

Materials ScienceElectrical EngineeringEngineeringNanoelectronicsApplied PhysicsGlass SubstrateSemiconductor Device FabricationAmorphous SolidSilicon On InsulatorThin Film ProcessingHot-wire CvdLow Temperature

References

	Year	Citations

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