39.3: Development of a Low Temperature Process of Ballistic Electron Surface‐Emitting Display (BSD) on a Glass Substrate

Abstract

Abstract Ballistic electron Surface‐emitting Display (BSD) is successfully fabricated on a glass substrate with low temperature process. 168 (RGB) × 126 pixels, 2.6 inches diagonal full‐colour BSD exhibits excellent performance as a flat panel display. Main fabrication process is an anodisation and subsequent electrochemical oxidation process at a low temperature, which will contribute to larger panel size and process‐cost reduction.