Concepedia

BaTiO3 thin film capacitors deposited by r.f. magnetron sputtering

Q. X. Jia, Zhenqi Shi, Wayne A. Anderson

Thin Solid Films · 1992 · 54 citations · 12 references

DOI

Concepts

References

12

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> grown YBa2Cu3O7−<i>d</i> thin films from single-target magnetron sputtering

Chang‐Beom Eom, Jian Sun, Kiyoshi Yamamoto et al. · Applied Physics Letters · 1989 · 420 citations

, , +16

Reliable single-target sputtering process for high-temperature superconducting films and devices

R. L. Sandstrom, W. J. Gallagher, T. R. Dinger et al. · Applied Physics Letters · 1988 · 144 citations

, , +15

Structural and electrical properties of rf-sputtered amorphous barium titanate thin films

K. Sreenivas, Abhai Mansingh, M. Sayer · Journal of Applied Physics · 1987 · 143 citations

, , +17

Fabrication of rf-Sputtered Barium Titanate Thin Films

I. H. Pratt, S. Firestone · Journal of Vacuum Science and Technology · 1971 · 76 citations · Full text

, , +17

Preparation of Thin BaTiO3 Films by dc Diode Sputtering

Yoshihiro Shintani, Osamu Tada · Journal of Applied Physics · 1970 · 60 citations

, , +17