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Large-scale integrated optics using TriPleX waveguide technology: from UV to IR
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2009
Year
WaveguidesOptical MaterialsEngineeringIntegrated PhotonicsOptic DesignNew ApplicationsOptoelectronic DevicesFiber OpticsIntegrated CircuitsOptical PropertiesInfrared OpticGuided-wave OpticPhotonic Integrated CircuitTriplextm WaveguidePlanar Waveguide SensorMaterials SciencePhotonicsOptical InterconnectsLarge-scale Integrated OpticsPhotonic MaterialsPhotonic DeviceApplied PhysicsOptical WaveguidesNew ClassWaveguide LasersOptoelectronicsTriplex Waveguide Technology
We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si<sub>3</sub>N<sub>4</sub>) shell filled with and encapsulated by silicon dioxide (SiO<sub>2</sub>). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.