Surface and Coatings Technology · 2008 · 30 citations · 49 references
Natural SciencesMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsSurface ScienceThin FilmsCoatingsMetalsMicrostructure ControlThin Film Mechanical PropertiesThin-film DepositionThin-film MaterialsAluminum NitrideIon PlatingNitrides Thin FilmsTitanium AlloysTitanium Nitride Coatings
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Reactive-sputter-deposited TiN films on glass substrates
Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations
Natural Sciences, Materials Engineering, Materials Science +14