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High-Quality Carbon Nanotube Growth at Low Temperature by Pulse-Excited Remote Plasma Chemical Vapor Deposition

DOI

23

Citations

5

References

2008

Year

Yuichi Yamazaki, Naoshi Sakuma, Masayuki Katagiri, Mariko Suzuki, Tadashi Sakai, Shintaro Sato, Mizuhisa Nihei, Yuji Awano
Applied Physics Express

Abstract

High-Quality Carbon Nanotube Growth at Low Temperature by Pulse-Excited Remote Plasma Chemical Vapor Deposition, Yamazaki, Yuichi, Sakuma, Naoshi, Katagiri, Masayuki, Suzuki, Mariko, Sakai, Tadashi, Sato, Shintaro, Nihei, Mizuhisa, Awano, Yuji

References

YearCitations

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