Mechanism of organization of three-dimensional islands in SiGe/Si multilayers

Abstract

The organization of coherent three-dimensional islands during the growth of SiGe/Si multilayers on Si(100) was investigated with cross-sectional transmission electron microscopy. Merging of islands of different initial size is found to be the dominant mechanism leading to a uniform size distribution. Upon overgrowth with Si, we observe a change of the shape of the islands from the {105}-faceted “hut” to a boxlike shape bounded on top by a (100) facet.