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An iron(II) diketonate–diamine complex as precursor for thin film fabrication by atomic layer deposition

Materials ScienceInorganic ChemistryEngineeringLayered MaterialSurface ScienceDiketonate–diamine ComplexThin Film Process TechnologyChemistryThin FilmsChemical DepositionThin Film FabricationChemical Vapor DepositionAtomic Layer DepositionThin Film Processing