High accuracy pressure measurement with a silicon resonant sensor - Concepedia

Concepedia

Publication | Closed Access

High accuracy pressure measurement with a silicon resonant sensor

47

Citations

2

References

1993

Year

J. C. Greenwood, T. E. Wray

Sensors and Actuators A Physical

Precision MeasurementEngineeringPressure MeasurementMeasurementMicrofabricationCalibrationSilicon Resonant SensorEducationSensor DesignInstrumentationSensor Technology

References

	Year	Citations

Page 1