Publication | Closed Access
Near-Infrared Spectroscopy for Monitoring Wafer Etchant Solution Using a Teflon Tube
11
Citations
6
References
2005
Year
EngineeringPhysicsInfrared SensorOptical DiagnosticsOptical PropertiesSpectroscopyApplied PhysicsNatural SciencesInfrared SpectroscopyNear-infrared SpectroscopyInstrumentationOptical SpectroscopyTeflon TubeSpectroscopic Method
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