Concepedia

In-situ electrical characterization of ultrathin TiN films grown by reactive dc magnetron sputtering on SiO2

Á.S. Ingason, F. Magnus, Jón S. Ágústsson, S. Ólafsson

Thin Solid Films · 2009 · 44 citations · 27 references

DOI

Concepts

References

27

Surface Studies of Solids by Total Reflection of X-Rays

L. G. Parratt · Physical Review · 1954 · 5.1K citations

, , +15

The mean free path of electrons in metals

E. H. Sondheimer · Advances In Physics · 1952 · 2.6K citations

, , +14

Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces

A. F. Mayadas, M. Shatzkes · Physical review. B, Solid state · 1970 · 2.2K citations

, , +17

Material selection for hard coatings

H. Holleck · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.2K citations

, , +17

Thin-film deposition: principles and practice

Choice Reviews Online · 1996 · 714 citations

, , +17