In-situ electrical characterization of ultrathin TiN films grown by reactive dc magnetron sputtering on SiO2 - Concepedia

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In-situ electrical characterization of ultrathin TiN films grown by reactive dc magnetron sputtering on SiO2

44

Citations

27

References

2009

Year

Á.S. Ingason, F. Magnus, Jón S. Ágústsson, S. Ólafsson

Thin Solid Films

Materials ScienceElectrical EngineeringIn-situ Electrical CharacterizationEngineeringOxide ElectronicsSurface ScienceApplied PhysicsReactive Dc MagnetronSemiconductor MaterialUltrathin Tin FilmsThin FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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