Concepedia

Publication | Open Access

IR emission from the target during plasma magnetron sputter deposition

DOIFull Paper Access

46

Citations

16

References

2013

Year

Pierre‐Antoine Cormier, Anne‐Lise Thomann, V. Dolique, A. Balhamri, Rémi Dussart, Nadjib Semmar, Thomas Lecas, Pascal Brault, Rony Snyders, Stéphanos Konstantinidis
Thin Solid Films

References

YearCitations

Page 1