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Microstructure effect on EM-induced copper interconnect degradation: Experiment and simulation

Materials ScienceMaterials EngineeringElectrical EngineeringMicrostructure EffectEngineeringAdvanced Packaging (Semiconductors)Electromigration TechniqueCorrosionApplied PhysicsMetallurgical InteractionElectronic PackagingMicroelectronicsMicrostructureElectrical Insulation