Concepedia

Publication | Closed Access

High current ion implantation by plasma immersion technique

DOI

12

Citations

2

References

1995

Year

R. Thomae, Brian D. Seiler, H. Bender, J. Brutscher, R. Günzel, Jadab Chandra Halder, H. Klein, J. Müller, Marko Sarstedt
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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