Publication | Open Access

Early stages of pulsed-laser growth of silicon microcolumns and microcones in air and SF6

Materials ScienceAdvanced Laser ProcessingEngineeringEarly StagesMicrofabricationLaser-induced BreakdownApplied PhysicsLaser ApplicationsPulsed-laser GrowthLaser Processing TechnologyLaser-assisted DepositionPulsed Laser DepositionLaser-surface InteractionsSilicon Microcolumns