Publication | Closed Access
Arrays of SU-8 microcantilevers with integrated piezoresistive sensors for parallel AFM applications
22
Citations
5
References
2010
Year
Electrical EngineeringEngineeringParallel Afm ApplicationsMicrofabricationIntegrated Piezoresistive SensorsMechanical EngineeringSu-8 MicrocantileversMicroactuatorMicropositioningInstrumentationMicroelectronicsMicro-electromechanical SystemMicromachined Ultrasonic Transducer
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