Concepedia

Publication | Closed Access

Single-crystal silicon micromirror array with polysilicon flexures

DOI

20

Citations

4

References

2005

Year

T.D. Kudrle, C.C. Wang, Mirela G. Bancu, James C. Hsiao, A. Pareek, M. Waelti, G. Kirkos, T. Shone, C.D. Fung, Carlos H. Mastrangelo
Sensors and Actuators A Physical

References

YearCitations

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