Single-pole-double-throw switch based on toggle switch

Abstract

A single-pole-double-throw (SPDT) switch based on the toggle switch, a new type of radio frequency (RF) microelectromechanical (MEMS) switch structure for low voltage actuation, high broadband application and enhanced power capability, is presented. Electromagnetic simulation results are discussed and the fabrication process and measurement results are given. The SPDT switch exhibits low insertion loss (<0.5 dB at 20 GHz) and high isolation (>28 dB at 30 GHz).