Publication | Closed Access
Phase mixture in MOCVD and reactive sputtering TiOxNy thin films revealed and quantified by XPS factorial analysis
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Citations
45
References
2006
Year
Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringPhase MixtureSurface ScienceApplied PhysicsXps Factorial AnalysisThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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